ABM-USA, Inc. provides a wide variety of sizes and configurations for Stand Alone UV Exposure Systems including 4", 6", and 8" round/square exposure beams with Near-UV (NUV), Mid-UV (MUV) and Deep-UV (DUV) wavelengths and 350W, 500W, 1,000W or 2,000W Constant Power/Constant Intensity Controlling Power Supplies.

ABM-USA, Inc. Exposure Systems are available with external Shutter Timers, Support Stands with Light Shields, and Slide Out Drawers with Vacuum Chucks to secure/pre-align 2", 3", 4", 6" wafers/substrates and Vacuum Mask Holders to secure/pre-align 2", 2.5", 3", 4", 5", 6", or 7" masks.

Slide Out Drawer Systems controls include:

    Substrate Vacuum On/Off

    Contact Vacuum On/Off


    Z-axis Proximity Gap setting (0~6 mm)

    N2 On/Off
    N2 level adjustment

    N2 and Vacuum gauges